Interferometer inspection of local defect type Young-Chalmers

Using the analogy of the double-slit experiment developed by Young and using interferometric technique developed by Chalmers, we built an interferometric arrangement that can analyze local defects of an optical surface. With a reflective spatial light modulator (RSLM) controlled by a PC, two apertures are open each time, and the apertures became as secondary light sources, producing interference pattern for specific zones for the surface under test. The interference pattern is observed, and storage into a computer by using a CCD camera. Finally the results are compared with the results obtained using a Fizeau commercial interferometer. (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.